HEM high voltage power supply

INTRODUCTION

The HEM series of Wisman high-voltage power supplies is a comprehensive multi-output high-voltage power supply dedicated to focusing ion beams. Typical applications include transmission and scanning electron microscopy; semiconductor analysis, milling and repair of optical drive heads, ions; beam etching and focused ion beam lithography. The modular design method allows individual components to be easily configured and assembled on a large chassis in a common rack. Interface, logic and control circuits are surface mount technology to minimize cost and size. Integrate acceleration power supply, filament power supply, absorb polar power, inhibit polar power and lens power. Ultra-low output ripple, excellent adjustment rate, stability, temperature drift and accuracy. Patented high-voltage suspension and digital control technology. The HEM series of high-precision modules are competitively priced and are ideal for OEM applications.

TYPICAL APPLICATION
Transmission Scanning Electron Microscope
Scanning Electron Microscope
Semiconductor analysis

Processing and repair
Ion beam etching
Focused ion beam lithography
Ripple 2ppm

SPECIFICATION

Input: DC24V, 47 to 63Hz

Accelerator power
Output voltage: 0 to -35KV
Output current: 450μA
Ripple: 70 mV P-P, from 0.1 Hz to 1MHZ
Line regulation: input change + / -10% for 100mV
Load regulation : ± 0.01%, maximum voltage, full load change
Stability: after 2 hours of warm-up, 1.5V/10 hours
Temperature coefficient: 25 PPM / °C

Filament power supply
Output voltage: 0 to 5 VDC
Output current: 0 to 5 A
Ripple: 10mA P-P, from 0.1 Hz to 1MHZ
Line regulation: + / -10% change to 5mA
Load regulation: ± 0.1%, maximum voltage, full load change
Stability: 5mA/10 minutes after warming up for 2 hours
Temperature coefficient: 200 PPM / °C

Suppressor power
Output voltage: -10v to-2kv
Output current: 300uA
Ripple: 20 mV P-P, from 0.1 Hz to 1MHZ
Line regulation: input + / -10% change to 100mV
Load regulation : ± 0.01%, maximum voltage, full load change
Stability: After preheating for 2 hours, 500mV/10 hours
Temperature coefficient: 25 PPM / °C

Extractor power

Output voltage: 0 to -15KV
Output current: 400μA
Ripple: 30 mV P-P, from 0.1 Hz to 1 MHZ, below 30μA
Line regulation: input + / -10% change is 100mV
Load regulation : ± 0.01%, maximum voltage, full load change
Stability: After preheating for 2 hours, 500mV/10 hours
Temperature coefficient: 25 PPM / °C