HSEM high voltage power supply

INTRODUCTION

Wisman’s HSEM series of high-voltage power supplies are comprehensive multi-output high-voltage power supplies dedicated to focusing ion beams. Typical applications include transmission and scanning electron microscopes; semiconductor analysis, milling and repair of optical drive heads, ions; beam etching and focused ion beam lithography. The modular design method allows individual components to be easily configured and assembled on a large chassis in a common rack. Interface, logic and control circuits are surface mount technology to minimize cost and size. Integrate acceleration power supply, filament power supply, absorb polar power, inhibit polar power and lens power. Ultra-low output ripple, excellent adjustment rate, stability, temperature drift and accuracy. Patented high-voltage suspension and digital control technology. The HSEM series of high-precision modules are competitively priced and are ideal for OEM applications.

TYPICAL APPLICATION

 

Transmission  scanning  electron  microscopy
Scanning  electron  microscopy
Semiconductor  analysis

Milling  and  repair
Ion  beam  etching
Focused  ion-beam  lithography

Ripple 2ppm

SPECIFICATION

Input: DC24V, 47 to 63Hz

Accelerator power supply

Output voltage: -200V to -60KV
Output current: 300μA
Ripple: 120 mV P-P, from 0.1 Hz to 1MHZ
Line regulation: input change + / -10% for 100mV
Load regulation : ± 0.01%, maximum voltage, full load change
Stability: 1.5V/10 hours after warming up for 2 hours
Temperature coefficient: 25 PPM / °C

Filament power supply

Output voltage: 0 to 5 VDC
Output current: 0 to 5 A
Ripple: 10mA P-P, from 0.1 Hz to 1MHZ
Line regulation: + / -10% change to 5mA
Load regulation: ± 0.1%, maximum voltage, full load change
Stability: 5mA/10 minutes after warming up for 2 hours
Temperature coefficient: 200 PPM / °C

Suppressor power supply
Output voltage: -10v to-2kv
Output current: 300uA
Ripple: 20 mV P-P, from 0.1 Hz to 1MHZ
Line regulation: input + / -10% change to 100mV
Load regulation: ± 0.01%, maximum voltage, full load change
Stability: After preheating for 2 hours, 500mV/10 hours
Temperature coefficient: 25 PPM / °C

Extractor power supply

Output voltage: 0 to -15KV
Output current: 400μA
Ripple: 30 mV P-P, from 0.1 Hz to 1 MHZ, below 400μA
Line regulation: input + / -10% change is 100mV
Load regulation: ± 0.01%, maximum voltage, full load change
Stability: After preheating for 2 hours, 500mV/10 hours
Temperature coefficient: 25 PPM / °C